A High-Resolution Silicon-on-Glass $Z$ Axis Gyroscope Operating at Atmospheric Pressure
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEE Sensors Journal
سال: 2010
ISSN: 1530-437X,1558-1748
DOI: 10.1109/jsen.2010.2043669